Method for making light emitting diode

ABSTRACT

A method of making a LED includes steps of providing a substrate having an epitaxial growth surface. A buffer layer and an intrinsic semiconductor layer are grown thereon in that order. A carbon nanotube layer is placed on the intrinsic semiconductor layer. A first semiconductor layer, an active layer, and a second semiconductor layer are grown in that order on the intrinsic semiconductor layer, the first semiconductor layer covering the carbon nanotube layer. A first electrode is applied to a surface of the second semiconductor layer and the substrate, the buffer layer, and the intrinsic semiconductor layer are removed to expose the carbon nanotube layer. A second electrode is applied to make electrical connections with the carbon nanotube layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/859,039, filed on Apr. 9, 2013, entitled, “METHOD FOR MAKING LIGHTEMITTING DIODE”, which is a continuation of U.S. patent application Ser.No. 13/288,183, filed on Nov. 3, 2011, entitled, “METHOD FOR MAKINGLIGHT EMITTING DIODE,” which claims all benefits accruing under 35U.S.C. §119 from China Patent Application No. 201110110765.7, filed onApr. 29, 2011 in the China Intellectual Property Office. The disclosuresof the above-identified applications are incorporated herein byreference.

BACKGROUND

1. Technical Field

The present disclosure relates to a light emitting diode (LED) and amethod for making the same.

2. Description of the Related Art

LEDs are semiconductors that convert electrical energy into light.Compared to conventional light sources, LEDs have higher energyconversion efficiency, higher radiance (i.e., they emit a largerquantity of light per unit area), longer lifetime, higher responsespeed, and better reliability. At the same time, LEDs generate lessheat. Therefore, LED modules are widely used as light sources in opticalimaging systems, such as displays, projectors, and the like.

A conventional method of making the LEDs method includes the followingsteps. A buffer layer, a first semiconductor layer, an active layer anda second semiconductor layer are deposited on a substrate by a metalorganic chemical vapor deposition method. The second semiconductor layerand the active layer are etched via an inductance-coupling plasmaetching process, thereby exposing a surface of the first semiconductorlayer. A first electrode is deposited on a top surface of the firstsemiconductor layer via an electron beam evaporation process. A secondelectrode is formed on the second semiconductor layer via an electronbeam evaporation process. In order to improve the light extractionefficiency of the LEDs, the second semiconductor is etched via aninductance-coupling plasma etching process to roughen a top surface. Theroughened top surface is used as the light extraction surface. However,in the above method, etching the light extraction surface to roughen thetop surface thereof is a complex manufacturing process and has a highmanufacturing cost. Furthermore, during the etching process, the latticestructure of the semiconductor layer may be destroyed.

What is needed, therefore, is a method for making a light emittingdiode, which can overcome the above-described shortcomings.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the embodiments can be better understood with referenceto the following drawings. The components in the drawings are notnecessarily drawn to scale, the emphasis instead being placed uponclearly illustrating the principles of the embodiments. Moreover, in thedrawings, like reference numerals designate corresponding partsthroughout the several views.

FIG. 1 is a flowchart of one embodiment a method for manufacturing aLED.

FIG. 2 shows a scanning electron microscope (SEM) image of oneembodiment of a drawn carbon nanotube film.

FIG. 3 shows a schematic view of one embodiment of a carbon nanotubesegment of a drawn carbon nanotube film.

FIG. 4 shows an SEM image of one embodiment of a plurality of carbonnanotube film are stacked in a cross order.

FIG. 5 shows an SEM image of one embodiment of an untwisted carbonnanotube wire.

FIG. 6 shows an SEM image of one embodiment of a twisted carbon nanotubewire.

FIG. 7 shows a transmission electron microscopy (TEM) view of a crosssection of a junction between the first semiconductor layer and thesubstrate.

FIG. 8 shows a schematic view of one embodiment of an LED fabricatedaccording to the method of FIG. 1.

FIG. 9 is a flowchart of one embodiment of a method for making an LED.

FIG. 10 shows a schematic view of one embodiment of an LED fabricatedaccording to the method of FIG. 9.

FIG. 11 shows a flowchart of one embodiment of a method for making anLED.

DETAILED DESCRIPTION

The disclosure is illustrated by way of example and not by way oflimitation in the figures of the accompanying drawings in which likereferences indicate similar elements. It should be noted that referencesto “an” or “one” embodiment in this disclosure are not necessarily tothe same embodiment, and such references mean “at least one.”

Referring to FIG. 1, a method for manufacturing a light emitting diode(LED) 10 includes the following steps:

(S11) providing a substrate 100 having an epitaxial growth surface 101;

(S12) placing a carbon nanotube layer 110 on the epitaxial growthsurface 101;

(S13) growing a first semiconductor layer 120, an active layer 130, anda second semiconductor layer 140 in that order on the epitaxial growthsurface 101;

(S14) placing a reflector 150 and a first electrode 160 in that order ona surface of the second semiconductor layer 140;

(S15) removing the substrate 100 to expose a surface of the firstsemiconductor layer 120 as a light extraction surface of the LED 10; and

(S16) applying a second electrode 170 on a surface of the firstsemiconductor layer 120.

In step (S11), the substrate 100 can be made of a transparent materialand adapted to support the first semiconductor layer 120. A shape or asize of the substrate 100 is selected according to need. The epitaxialgrowth surface 101 grows the first semiconductor layer 120. Theepitaxial growth surface 101 is a clean and smooth surface. Thesubstrate 100 can be a single-layer structure or a multi-layerstructure. If the substrate 100 is a single-layer structure, thesubstrate 100 can be a single crystal structure having a face of thecrystal used as the epitaxial growth surface 101. If the substrate 100is a multi-layer structure, the substrate 100 should include at leastone layer having the crystal face. The material of the substrate 100 canbe GaAs, GaN, AlN, Si, SOI SiC, MgO, ZnO, LiGaO2, LiAlO2, or Al2O3. Thematerial of the substrate 100 can be selected according to the materialof the first semiconductor layer 120. The first semiconductor layer 120and the substrate 100 should have a small crystal lattice mismatch and athermal expansion mismatch. The size, thickness, and shape of thesubstrate 100 can be selected according to need. In one embodiment, thesubstrate 100 is a sapphire substrate.

In step (S12), the first carbon nanotube layer 110 includes a pluralityof carbon nanotubes. The carbon nanotubes in the first carbon nanotubelayer 110 can be single-walled, double-walled, or multi-walled carbonnanotubes. The length and diameter of the carbon nanotubes can beselected according to need. The thickness of the first carbon nanotubelayer 110 can be in a range from about 1 nm to about 100 μm, forexample, about 10 nm, 100 nm, 200 nm, 1 μm, 10 μm, or 50 μm. The firstcarbon nanotube layer 110 forms a pattern so that part of the epitaxialgrowth surface 101 can be exposed from the patterned first carbonnanotube layer 110 after the first carbon nanotube layer 110 is placedon the epitaxial growth surface 101. Thus, the first semiconductor layer120 can grow from the exposed epitaxial growth surface 101.

The patterned first carbon nanotube layer 110 defines a plurality offirst apertures 112. The first apertures 112 can be dispersed uniformly.The apertures 112 extend throughout the first carbon nanotube layer 110along the thickness direction thereof. The apertures 112 can be a holedefined by several adjacent carbon nanotubes, or a gap defined by twosubstantially parallel carbon nanotubes and extending along axialdirection of the carbon nanotubes. If the aperture 112 is a hole, theaverage diameter of the apertures 112 can be in a range from about 10 nmto about 500 μm. If the aperture 112 is a gap, the average width of theapertures 112 can be in a range from about 10 nm to about 500 μm. Thehole-shaped apertures 112 and the gap-shaped apertures 112 can exist inthe patterned first carbon nanotube layer 110 at the same time.Hereafter, the size of the apertures 112 can mean the diameter of thehole or the width of the gap. The sizes of the first apertures 112 canbe different. The sizes of the first apertures 112 can be in a rangefrom about 10 nm to about 300 μm, for example, about 50 nm, 100 nm, 500nm, 1 μm, 10 μm, 80 μm or 120 μm. The smaller the sizes of the firstapertures 112, the less dislocation defects will occur during theprocess of growing first semiconductor layer 120. In one embodiment, thesizes of the first apertures 112 are in a range from about 10 nm toabout 10 μm. The duty factor of the first carbon nanotube layer 110means an area ratio between the sheltered epitaxial growth surface 101and the exposed epitaxial growth surface 101. The duty factor of thefirst carbon nanotube layer 110 can be in a range from about 1:100 toabout 100:1, for example, about 1:10, 1:2, 1:4, 4:1, 2:1 or 10:1. In oneembodiment, the duty factor of the first carbon nanotube layer 110 is ina range from about 1:4 to about 4:1.

The carbon nanotubes of the first carbon nanotube layer 110 can beorderly arranged to form an ordered carbon nanotube structure ordisorderly arranged to form a disordered carbon nanotube structure. Theterm ‘disordered carbon nanotube structure’ includes, but is not limitedto, a structure where the carbon nanotubes are arranged along manydifferent directions, and the aligning directions of the carbonnanotubes are random. The number of the carbon nanotubes arranged alongeach different direction can be almost the same (e.g. uniformlydisordered). The disordered carbon nanotube structure can be isotropic.The carbon nanotubes in the disordered carbon nanotube structure can beentangled with each other. The term ‘ordered carbon nanotube structure’includes, but is not limited to, a structure where the carbon nanotubesare arranged in a systematic and consistent manner, e.g., the carbonnanotubes are arranged approximately along a same direction and/or havetwo or more sections within each of which the carbon nanotubes arearranged approximately along a same direction (different sections canhave different directions).

In one embodiment, the carbon nanotubes in the first carbon nanotubelayer 110 are arranged to extend along the direction substantiallyparallel to the surface of the first carbon nanotube layer 110 to obtaina better pattern and greater light transmission. After being placed onthe epitaxial growth surface 101, the carbon nanotubes in the firstcarbon nanotube layer 110 are arranged to extend along the directionsubstantially parallel to the epitaxial growth surface 101. In oneembodiment, all the carbon nanotubes in the first carbon nanotube layer110 are arranged to extend along the same direction. In anotherembodiment, some of the carbon nanotubes in the first carbon nanotubelayer 110 are arranged to extend along a first direction, and some ofthe carbon nanotubes in the first carbon nanotube layer 110 are arrangedto extend along a second direction, substantially perpendicular to thefirst direction. The carbon nanotubes in the ordered carbon nanotubestructure can also be arranged to extend along the crystal orientationof the substrate 100 or along a direction which forms an angle with thecrystal orientation of the substrate 100.

The first carbon nanotube layer 110 can be formed on the epitaxialgrowth surface 101 by chemical vapor deposition (CVD), transfer printinga preformed carbon nanotube film, or filtering and depositing a carbonnanotube suspension. However, all of the above described methods needsupport of an assistant. In one embodiment, the first carbon nanotubelayer 110 is a free-standing structure and can be drawn from a carbonnanotube array. The term “free-standing structure” means that the firstcarbon nanotube layer 110 can sustain the weight of itself when hoistedby a portion thereof without any significant damage to its structuralintegrity. Thus, the first carbon nanotube layer 110 can be suspended bytwo spaced supports. The free-standing first carbon nanotube layer 110can be laid on the epitaxial growth surface 101 directly and easily.

The first carbon nanotube layer 110 can be a substantially purestructure of the carbon nanotubes, with few impurities and chemicalfunctional groups. The first carbon nanotube layer 110 can be acomposite including a carbon nanotube matrix and non-carbon nanotubematerials. The non-carbon nanotube materials can be graphite, graphene,silicon carbide, boron nitride, silicon nitride, silicon dioxide,diamond, or amorphous carbon, metal carbides, metal oxides, or metalnitrides. The non-carbon nanotube materials can be coated on the carbonnanotubes of the first carbon nanotube layer 110 or filled in theapertures 112. In one embodiment, the non-carbon nanotube materials arecoated on the carbon nanotubes of the first carbon nanotube layer 110 sothe carbon nanotubes have a greater diameter and the first apertures 112can have a smaller size. The non-carbon nanotube materials can bedeposited on the carbon nanotubes of the first carbon nanotube layer 110by CVD or by physical vapor deposition (PVD), such as sputtering.

Furthermore, the first carbon nanotube layer 110 can be treated with anorganic solvent after being placed on the epitaxial growth surface 101so the first carbon nanotube layer 110 can be attached on the epitaxialgrowth surface 101 firmly. Specifically, the organic solvent can beapplied to the entire surface of the first carbon nanotube layer 110 orthe entire first carbon nanotube layer 110 can be immersed in an organicsolvent. The organic solvent can be volatile, such as ethanol, methanol,acetone, dichloroethane, chloroform, or mixtures thereof. In oneembodiment, the organic solvent is ethanol.

The first carbon nanotube layer 110 can include at least one carbonnanotube film, at least one carbon nanotube wire, or a combinationthereof. In one embodiment, the first carbon nanotube layer 110 caninclude a single carbon nanotube film or two or more stacked carbonnanotube films. Thus, the thickness of the first carbon nanotube layer110 can be controlled by controlling the number of the stacked carbonnanotube films. The number of the stacked carbon nanotube films can bein a range from about 2 to about 100, for example, 10, 30, or 50. In oneembodiment, the first carbon nanotube layer 110 can include a layer ofparallel and spaced carbon nanotube wires. Also, the first carbonnanotube layer 110 can include a plurality of carbon nanotube wirescrossed, or woven together to form a carbon nanotube net. The distancebetween two adjacent parallel and spaced carbon nanotube wires can be ina range from about 0.1 μm to about 200 μm. In one embodiment, thedistance between two adjacent parallel and spaced carbon nanotube wirescan be in a range from about 10 μm to about 100 μm. The gap between twoadjacent substantially parallel carbon nanotube wires is defined as theaperture 112. The size of each of the apertures 112 can be controlled bycontrolling the distance between two adjacent parallel and spaced carbonnanotube wires. The length of the gap between two adjacent parallelcarbon nanotube wires can be equal to the length of the carbon nanotubewire. It is understood that any carbon nanotube structure described canbe used in all embodiments.

In one embodiment, the first carbon nanotube layer 110 includes at leastone drawn carbon nanotube film. A drawn carbon nanotube film can bedrawn from a carbon nanotube array that is able to have a film drawntherefrom. The drawn carbon nanotube film includes a plurality ofsuccessive and oriented carbon nanotubes joined end-to-end by van derWaals attractive force therebetween. The drawn carbon nanotube film is afree-standing film. Referring to FIGS. 2 to 3, each drawn carbonnanotube film includes a plurality of successively oriented carbonnanotube segments 113 joined end-to-end by van der Waals attractiveforce therebetween. Each carbon nanotube segment 113 includes aplurality of carbon nanotubes 115 parallel to each other, and combinedby van der Waals attractive force therebetween. Some variations canoccur in the drawn carbon nanotube film. The carbon nanotubes 115 in thedrawn carbon nanotube film are oriented along a preferred orientation.The drawn carbon nanotube film can be treated with an organic solvent toincrease the mechanical strength and toughness and reduce thecoefficient of friction of the drawn carbon nanotube film. A thicknessof the drawn carbon nanotube film can range from about 0.5 nm to about100 μm. The drawn carbon nanotube film can be attached to the epitaxialgrowth surface 101 directly.

Referring to FIG. 4, the first carbon nanotube layer 110 can include atleast two stacked drawn carbon nanotube films. In other embodiments, thefirst carbon nanotube layer 110 can include two or more coplanar carbonnanotube films, and can include layers of coplanar carbon nanotubefilms. Additionally, if the carbon nanotubes in the carbon nanotube filmare aligned along one preferred orientation (e.g., the drawn carbonnanotube film), an angle can exist between the orientation of carbonnanotubes in adjacent films, whether stacked or adjacent. Adjacentcarbon nanotube films can be combined by only the van der Waalsattractive force therebetween. An angle between the aligned directionsof the carbon nanotubes in two adjacent carbon nanotube films can rangefrom about 0 degrees to about 90 degrees. If the angle between thealigned directions of the carbon nanotubes in adjacently stacked drawncarbon nanotube films is larger than 0 degrees, a plurality ofmicropores is defined by the first carbon nanotube layer 110. Referringto FIG. 4, the first carbon nanotube layer 110 is shown with the anglebetween the aligned directions of the carbon nanotubes in adjacentlystacked drawn carbon nanotube films is 90 degrees. Stacking the carbonnanotube films will also add to the structural integrity of the firstcarbon nanotube layer 110.

A step of heating the drawn carbon nanotube film can be performed todecrease the thickness of the drawn carbon nanotube film. The drawncarbon nanotube film can be partially heated by a laser or microwaves.The thickness of the drawn carbon nanotube film is reduced because someof the carbon nanotubes will be oxidized. In one embodiment, the drawncarbon nanotube film is irradiated by a laser device in an oxygen-onlyatmosphere. The power density of the laser is greater than 0.1×10⁴ W/m².The drawn carbon nanotube film can be heated by fixing the drawn carbonnanotube film and moving the laser device at an even/uniform speed toirradiate the drawn carbon nanotube film. When the laser irradiates thedrawn carbon nanotube film, the laser is focused on the surface of drawncarbon nanotube film to form a laser spot. The diameter of the laserspot ranges from about 1 micron to about 5 mm. In one embodiment, thelaser device is carbon dioxide laser device. The power of the laserdevice is 30 W. The wavelength of the light from the laser is 10.6 μm.The diameter of the laser spot is 3 mm. The velocity of the lasermovement is less than 10 mm/s. The power density of the laser is0.053×10¹² W/m².

In another embodiment, the first carbon nanotube layer 110 can include apressed carbon nanotube film. The pressed carbon nanotube film can be afree-standing carbon nanotube film. The carbon nanotubes in the pressedcarbon nanotube film are arranged along a same direction or arrangedalong different directions. The carbon nanotubes in the pressed carbonnanotube film can rest upon each other. Adjacent carbon nanotubes areattracted to each other and combined by van der Waals attractive force.An angle between a primary alignment direction of the carbon nanotubesand a surface of the pressed carbon nanotube film is 0 degrees toapproximately 15 degrees. The greater the pressure applied, the smallerthe angle formed. If the carbon nanotubes in the pressed carbon nanotubefilm are arranged along different directions, the first carbon nanotubelayer 110 will be isotropic.

In another embodiment, the first carbon nanotube layer 110 includes aflocculated carbon nanotube film. The flocculated carbon nanotube filmcan include a plurality of long, curved, disordered carbon nanotubesentangled with each other. Further, the flocculated carbon nanotube filmcan be isotropic. The carbon nanotubes can be substantially uniformlydispersed in the carbon nanotube film. Adjacent carbon nanotubes areacted upon by van der Waals attractive force to form an entangledstructure with micropores defined therein. It is understood that theflocculated carbon nanotube film is very porous. Sizes of the microporescan be less than 10 μm. The porous nature of the flocculated carbonnanotube film will increase specific surface area of the first carbonnanotube layer 110. Further, because the carbon nanotubes in the firstcarbon nanotube layer 110 are entangled with each other, the firstcarbon nanotube layer 110 employing the flocculated carbon nanotube filmhas excellent durability, and can be fashioned into desired shapes witha low risk to the integrity of the first carbon nanotube layer 110. Theflocculated carbon nanotube film, in some embodiments, is free standingbecause of the structure of carbon nanotubes being entangled andadhering together by van der Waals attractive force therebetween.

The carbon nanotube wire can be untwisted or twisted. Treating the drawncarbon nanotube film with a volatile organic solvent can form theuntwisted carbon nanotube wire. Specifically, the organic solvent soaksevery surface of the drawn carbon nanotube film. During the soaking,adjacent parallel carbon nanotubes in the drawn carbon nanotube filmwill bundle together, due to the surface tension of the organic solventas it evaporates, and thus the drawn carbon nanotube film will be shrunkinto untwisted carbon nanotube wire. Referring to FIG. 5, the untwistedcarbon nanotube wire includes a plurality of carbon nanotubessubstantially oriented along a same direction (i.e., a direction alongthe length of the untwisted carbon nanotube wire). The carbon nanotubesare parallel to the axis of the untwisted carbon nanotube wire. Morespecifically, the untwisted carbon nanotube wire includes a plurality ofsuccessive carbon nanotube segments joined end to end by van der Waalsattractive force therebetween. Each carbon nanotube segment includes aplurality of carbon nanotubes substantially parallel to each other, andcombined by van der Waals attractive force therebetween. The carbonnanotube segments can vary in width, thickness, uniformity, and shape.The length of the untwisted carbon nanotube wire can be arbitrarily setas desired. A diameter of the untwisted carbon nanotube wire ranges fromabout 0.5 nm to about 100 μm.

The twisted carbon nanotube wire can be formed by twisting a drawncarbon nanotube film using a mechanical force to turn the two ends ofthe drawn carbon nanotube film in opposite directions. Referring to FIG.6, the twisted carbon nanotube wire includes a plurality of carbonnanotubes helically oriented around an axial direction of the twistedcarbon nanotube wire. More specifically, the twisted carbon nanotubewire includes a plurality of successive carbon nanotube segments joinedend to end by van der Waals attractive force therebetween. Each carbonnanotube segment includes a plurality of carbon nanotubes parallel toeach other, and combined by van der Waals attractive force therebetween.Length of the carbon nanotube wire can be set as desired. A diameter ofthe twisted carbon nanotube wire can be from about 0.5 nm to about 100μm. Further, the twisted carbon nanotube wire can be treated with avolatile organic solvent after being twisted. After being soaked by theorganic solvent, the adjacent paralleled carbon nanotubes in the twistedcarbon nanotube wire will bundle together, due to the surface tension ofthe organic solvent when the organic solvent evaporates. The specificsurface area of the twisted carbon nanotube wire will decrease, whilethe density and strength of the twisted carbon nanotube wire will beincreased.

As discussed above, the first carbon nanotube layer 110 can be used as amask for growing the first semiconductor layer 120. The term ‘mask forgrowing the first semiconductor layer 120’ means that the first carbonnanotube layer 110 can be used to shelter part of the epitaxial growthsurface 101 and expose another part of the epitaxial growth surface 101.Thus, the first semiconductor layer 120 can be grown from the exposedepitaxial growth surface 101. The first carbon nanotube layer 110 formsa pattern mask on the epitaxial growth surface 101 because the firstcarbon nanotube layer 110 defines a plurality of first apertures 112.Compared to lithography or an etching process, the method of forming afirst carbon nanotube layer 110 as a mask is simple, low cost, and doesnot pollute the substrate 100.

In step (S13), the first semiconductor layer 120, the active layer 130and the second semiconductor layer 140 can be grown respectively via aprocess of molecular beam epitaxy (MBE), chemical beam epitaxy (CBE),vacuum epitaxy, low temperature epitaxy, selective epitaxy, liquid phasedeposition epitaxy (LPE), metal organic vapor phase epitaxy (MOVPE),ultra-high vacuum chemical vapor deposition (UHVCVD), hydride vaporphase epitaxy (HYPE), and metal organic chemical vapor deposition(MOCVD). In one embodiment, the material of the first semiconductorlayer 120, the active layer 130, and the second semiconductor layer 140are the same semiconductor material, thus any defects caused bydislocation during the growth process will be reduced.

The first semiconductor layer 120 has a thickness of about 0.5 nm toabout 5 μm, for example 10 nm, 100 nm, 1 μm, 2 μm, and 3 μm. In oneembodiment, the thickness of the first semiconductor layer 120 is about2 μm. The first semiconductor layer 120 is an N-type semiconductor or aP-type semiconductor. The material of N-type semiconductor can includeN-type gallium nitride, N-type gallium arsenide, or N-type copperphosphate. The material of P-type semiconductor can include P-typegallium nitride, P-type gallium arsenide, or P-type copper phosphate.The N-type semiconductor is configured to provide electrons, and theP-type semiconductor is configured to provide electron holes. In oneembodiment, the first semiconductor layer 120 is an N-type galliumnitride doped with Si.

In one embodiment, the first semiconductor layer 120 is made by an MOCVDmethod, and the growth of the first semiconductor layer 120 is aheteroepitaxial growth. In the MOCVD method, the nitrogen source gas ishigh-purity ammonia (NH₃), the carrier gas is hydrogen (H₂), the Gasource gas is trimethyl gallium (TMGa) or triethyl gallium (TEGa), andthe Si source gas is silane (SiH₄). The growth of the firstsemiconductor layer 120 includes following steps:

(S131) placing the substrate 100 with the first carbon nanotube layer110 thereon into a reaction chamber and heating the substrate 100 toabout 1100° C. to about 1200° C., introducing the carrier gas, andbaking the substrate 100 for about 200 seconds to about 1000 seconds;

(S132) growing the low-temperature GaN layer by reducing the temperatureto a range from about 500° C. to 650° C. in the carrier gas atmosphere,and introducing the Ga source gas and the nitrogen source gas at thesame time;

(S133) stopping the flow of the Ga source gas in the carrier gas andnitrogen source gas atmosphere, increasing the temperature to a rangefrom about 1100° C. to about 1200° C. and maintaining the temperaturefor about 30 seconds to about 300 seconds;

(S134) growing the high quality first semiconductor layer 120 bymaintaining the temperature of the substrate 100 in a range from about1000° C. to about 1100° C., and reintroducing the Ga source gas againand the Si source gas.

In step (S132), the low-temperature GaN is used as a buffer layer (notshown) to grow the first semiconductor layer 120. The thickness of thebuffer layer is less than the thickness of the first carbon nanotubelayer 110. Because the first semiconductor layer 120 and the substrate100 has different lattice constants, the buffer layer reduces anylattice mismatch during the growth process, thus the dislocation densityof the first semiconductor layer 120 will be reduced.

In step (S134), the growth of the first semiconductor layer 120 includesthree stages. In the first stage, a plurality of epitaxial crystalnuclei is formed on the epitaxial growth surface 101, and the epitaxialcrystal nuclei grow into a plurality of epitaxial crystal grains alongthe direction perpendicular to the epitaxial growth surface 101. In thesecond stage, the plurality of epitaxial crystal grains grows to acontinuous epitaxial film along the direction parallel to the epitaxialgrowth surface 101. In the third stage, the epitaxial film continuouslygrows along the direction perpendicular to the epitaxial growth surface101 to form a high quality epitaxial film. The epitaxial growth grains,epitaxial film, and the high-quality epitaxial film constitute the firstsemiconductor layer 120.

In the first stage, because the first carbon nanotube layer 110 isplaced on the epitaxial growth surface 101, the epitaxial crystal grainsare only grown from the exposed epitaxial growth surface 101 through theapertures 112. The process of epitaxial crystal grains growing along thedirection substantially perpendicular to the epitaxial growth surface101 is called vertical epitaxial growth.

In the second stage, the epitaxial crystal grains grow along thedirection parallel to the epitaxial growth surface 101. The epitaxialcrystal grains gradually join together to form the epitaxial film tocover the first carbon nanotube layer 110. During the growth process,the epitaxial crystal grains grow around the carbon nanotubes, and thena plurality of grooves 122 is formed in the first semiconductor layer110 where the carbon nanotubes exist. The extending direction of thegrooves 122 is parallel to the orientated direction of the carbonnanotubes. The carbon nanotubes are placed into the grooves 122 andenclosed by the first semiconductor layer 120 and the substrate 100,thus the carbon nanotubes are semi-enclosed in the first semiconductorlayer 120. An inner wall of the grooves 122 can be in contact with thecarbon nanotubes or be spaced from the carbon nanotubes, which dependson whether the material of the epitaxial film and the carbon nanotubeshave mutual infiltration. Each groove 122 includes at least one carbonnanotube. The carbon nanotubes in the grooves 122 are joined by van derWaals force to form the first carbon nanotube layer 110. The shape ofthe grooves 122 is arbitrary in relation to the patterned first carbonnanotube layer 110. The maximum width of the grooves 122 ranges fromabout 20 nm to about 200 nm. The maximum width is the maximum size alongthe direction perpendicular to the extending direction of the grooves122. In one embodiment, the maximum width of the grooves 122 ranges fromabout 50 nm to about 100 nm. The plurality of grooves 122 forms apatterned surface on the first semiconductor layer 120. The patternedsurface of the first semiconductor layer 120 is similar to the firstcarbon nanotube layer 110.

The first carbon nanotube layer 110 includes a carbon nanotube film or aplurality of intersecting carbon nanotube wires, and the plurality ofgrooves 122 interconnect with each other to form a continuous networkstructure. The carbon nanotubes also interconnect with each other toform a conductive structure. While the first carbon nanotube layer 110includes a plurality of carbon nanotube wires parallel to each other,the plurality of grooves 122 will also be parallel to each other. Thegrooves 122 are aligned at certain intervals, the distance between thetwo adjacent grooves 122 is substantially equal to the distance betweenthe two adjacent carbon nanotube wires.

Also referring to FIG. 7, a cross section of a junction between thefirst semiconductor layer 120 and the substrate 100 is shown. The darklayer is the first semiconductor layer 120, and the lighter layer is thesubstrate 100. The grooves 122 exist on the face of the firstsemiconductor layer 120. The carbon nanotubes are semi-enclosed by thegrooves 122 and attached on the surface of the substrate 100. In oneembodiment, the carbon nanotubes are spaced from the first semiconductorlayer 120.

The active layer 130 is deposited on the first semiconductor layer 120.The thickness of the active layer 130 ranges from about 0.01 μm to about0.06 μm. The active layer 130 is a photon excitation layer and can beone of a single layer quantum well film or multilayer quantum wellfilms. The active layer 130 is made of GaInN, AlGaInN, GaSn, AlGaSn,GaInP, or GaInSn. In one embodiment, the active layer 130 has athickness of about 0.3 μm and includes one layer of GaInN and anotherlayer of GaN. The GaInN and GaN layers are stacked. The growth method ofthe active layer 130 is similar to the first semiconductor layer 120. Inone embodiment, the indium source gas is trimethyl indium. The growth ofthe active layer 130 after the growth of the first semiconductor layer120 includes the following steps:

(a1) stopping the flow of the Si source gas and maintaining thetemperature of the reaction reaction chamber to a range from about 700°C. to about 900° C., the pressure of the reaction reaction chamberranging from about 50 torrs to about 500 torrs; and

(a2) introducing the indium source gas and growing InGaN/GaN multilayerquantum well film to form the active layer 130.

The thickness of the second semiconductor layer 140 ranges from about0.1 μm to about 3 μm. The second semiconductor layer 140 can be anN-type semiconductor layer or a P-type semiconductor layer. Furthermore,the type of the second semiconductor layer 140 is different from thetype of the first semiconductor layer 120. A surface of the secondsemiconductor layer 140 is used as an extraction surface of the LEDs. Inone embodiment the second semiconductor layer 140 is P-type galliumnitride doped with Mg. The thickness of the second semiconductor layer140 is about 0.3 μm. The growth of the second semiconductor layer 140 issimilar to the first semiconductor layer 120. The second semiconductor140 is grown after the growth of the active layer 130. In oneembodiment, the Mg source gas is ferrocene magnesium (Cp₂Mg), and themethod includes the following steps:

(b1) stopping the flow of the indium source gas and maintaining thetemperature of the reaction chamber in a range from about 1000° C. toabout 1100° C., and maintaining the pressure of the reaction reactionchamber in a range from about 76 torrs to about 200 torrs; and

(b2) introducing the Mg source gas and growing P-type gallium nitridedoped with Mg to form the second semiconductor layer 140.

In step (S14), the reflector 150 is placed on the surface of the secondsemiconductor layer 140. The reflector 150 can be placed on the secondsemiconductor layer 140 via a method of physical vapor deposition, suchas electron beam evaporation, vacuum evaporation, ion sputtering, orphysical deposition. The material of the reflector 150 can be selectedfrom titanium (Ti), silver (Ag), aluminum (Al), nickel (Ni), gold (Au)or any combination thereof. The reflector 150 includes a smooth surfacehaving a high reflectivity. The reflector 150 has a high electricalconductivity for contact with the second semiconductor layer 140. In oneembodiment, the reflector 150 is a composite structure composed ofNi/Cu/Al. The Al layer is in contact with the second semiconductor layer140. The shape of the reflector 150 is arbitrary. In one embodiment, thereflector 150 covers a whole surface of the second semiconductor layeraway from the active layer 130, thus the reflectivity can be improved.The electrons extracted from the active layer 130 reach the reflector150 and are reflected. Transmitting electrons are transmitted away fromthe reflector 150.

The thickness of the reflector 150 can be selected according to need. Inone embodiment, the reflector 150 is composed of Ni/Cu/Al and has athickness in the range from about 50 nm to about 250 nm. The Ni layerhas a thickness in the range from about 10 nm to about 50 nm, the Culayer has a thickness in the range from about 10 nm to about 50 nm, andthe Al layer has a thickness in the range from about 30 nm to about 150nm. In one embodiment, the thickness of Ni layer is about 20 nm, thethickness of the Cu layer is about 20 nm, and the thickness of the Al isabout 100 nm.

The first electrode 160 is placed on the surface of the reflector 150.The shape of the first electrode 160 is arbitrary and can be selectedaccording to need. In one embodiment, the first electrode 160 covers thewhole surface of the reflector 150, thus the current density and thecurrent diffusion rate can be improved. The first electrode 160 can alsobe used as the heat sink at the same time to conduct the heat out of theLED. The first electrode 160 is a single layer structure or amulti-layer structure. The material of the first electrode 160 can beselected from Ti, Ag, Al, Ni, Au, or any combination. The material ofthe first electrode 160 can also be indium-tin oxide (ITO) or carbonnanotube film. In one embodiment, the first electrode 160 is a two-layerstructure consisting of a Ti layer with about 15 nm in thickness and anAu layer with about 100 nm in thickness. Furthermore, the reflector 150and the first electrode 160 can be an integrated structure. Thereflector 150 can also be used as the first electrode 160 or the firstelectrode 160 can also be used as a reflector in relation to theelectrons. If the first electrode 160 is transparent, the order offabrication can be reversed or exchanged so the first electrode 160 isplaced between the reflector 150 and the second semiconductor layer 140.

In step (S15), the substrate 100 can be removed by laser irradiation,etching, or thermal expansion and contraction. The removal method can beselected according to the material of the substrate 100 and the firstsemiconductor layer 120. In one embodiment, the substrate 100 is removedby laser irradiation. The substrate 100 can be removed from the firstsemiconductor layer 120 by the following steps:

(S151) polishing and cleaning the surface of the substrate 100 away fromthe first semiconductor layer 120;

(S152) placing the substrate 100 on a platform (not shown) andirradiating the substrate 100 and the first semiconductor layer 120 witha laser; and

(S153) immersing the substrate 100 into a solvent and removing thesubstrate 100.

In step (S151), the substrate 100 can be polished by a mechanicalpolishing method or a chemical polishing method to obtain a smoothsurface. Thus any scattering of the laser will be reduced. The substrate100 can be cleaned with hydrochloric acid or sulfuric acid to removemetallic impurities and oil.

In step (S152), the substrate 100 is irradiated by the laser from thepolished surface, and the incidence angle of the laser is perpendicularto the surface of the substrate 100. The wavelength of the laser isselected according to the material of the first semiconductor layer 120and the substrate 100. The energy of the laser is smaller than thebandgap energy of the substrate 100 and larger than the bandgap energyof the first semiconductor layer 120. Thus the laser can pass throughthe substrate 100 and reach the interface between the substrate 100 andthe first semiconductor layer 120. The buffer layer 1202 at theinterface has a strong absorption property of the laser, and thetemperature of the buffer layer 1202 will be raised rapidly. Thus thebuffer layer 1202 will be decomposed.

In one embodiment, the bandgap energy of the first semiconductor layer120 is about 3.3 ev, and the bandgap energy of the substrate 100 isabout 9.9 ev. The laser is a KrF laser, the wavelength of the laser isabout 248 nm, the energy is about 5 ev, the pulse width range is about20 nanoseconds to about 40 nanoseconds, the energy density ranges fromabout 400 mJ/cm² to about 600 mJ/cm², and the shape of the laser beampattern is square with a size of 0.5 mm×0.5 mm. The laser moves from oneedge of the substrate 100 with a speed of 0.5 mm/s During theirradiating process, the GaN is decomposed to Ga and N₂. It isunderstood that the parameters of the laser can be adjusted according toneed. The wavelength of the laser can be selected according to theabsorptive properties of the buffer layer 1202.

Because the buffer layer 1202 is strongly absorptive of the laser, thebuffer layer 1202 can be decomposed rapidly. However, the firstsemiconductor layer 120 has a weaker absorption property, so it does notdecompose quickly. The irradiating process can be performed in a vacuumor a protective gas environment to prevent the oxidation of the carbonnanotubes. The protective gas can be nitrogen, helium, argon or otherinert gas.

In step (S153), the substrate 100 is immersed into an acidic solution toremove the Ga decomposed from GaN so that the substrate 100 can bepeeled off the first semiconductor layer 120. In one embodiment, thefirst carbon nanotube layer 110 is directly attached on the epitaxialgrowth surface 101 of the substrate 100, so the carbon nanotubes withthe substrate 100 can be peeled off together. During the peelingprocess, the shape and the distribution of the grooves are not changed.

In the thermal expansion and contraction method, the substrate 100 isheated to a temperature above 1000° C. and cooled to a temperature below1000° C. within a short period of time, such as from 2 minutes to about20 minutes. The substrate 100 is separated from the first semiconductorlayer 110 by fracture because of the thermal expansion mismatch betweenthe substrate 100 and the first semiconductor layer 110.

In step (S16), the second electrode 170 is placed on the firstsemiconductor layer 120 via a process of physical vapor deposition, suchas electron beam evaporation, vacuum evaporation, ion sputtering,physical deposition, or the like. Furthermore, the second electrode 170can be formed by applying a conductive plate on the first semiconductorlayer 120 via a conductive adhesive. The second electrode 170electrically contacts the first semiconductor layer 120 and is disposedon the light extraction surface of the LED 10. The second electrode 170is placed via a process of physical vapor deposition, and forms acontinuous layer-structure. Because the first semiconductor layer 120includes a plurality of grooves 122, a portion of the second electrode170 will be deposited into the grooves 122. Furthermore, the secondelectrode 170 can be a transparent substrate or a carbon nanotube film.The second electrode 170 covers some of the grooves 122. In oneembodiment, the second electrode 170 covers all the grooves 122, thusthe current diffusion speed will be improved and the heat produced inthe LED will be reduced. The second electrode 170 can be an N-typeelectrode or a P-type electrode. The type of the second electrode 170 issame as that of the first semiconductor layer 120. The second electrode170 is a single layer structure or a multi-layer structure. The materialof the second electrode 170 can be selected from Ti, Ag, Al, Ni, Au orany combination. The material of the second electrode 170 can also beITO. In one embodiment, the second electrode 170 is transparent toreduce the reflectivity and the absorption, thus improving the lightextraction efficiency.

The method for making the LED 10 has many advantages. First, the carbonnanotube layer is a free-standing structure, thus it can be directlyplaced on the surface of the substrate and a complex sputtering andetching process is not required. Second, due to the existence of thecarbon nanotubes, the plurality of grooves are formed in the LED, thusthe complex etching method can be avoided and damage to the latticestructure of the LED is reduced. Third, because the diameter of thecarbon nanotubes and the width of the grooves are so small, the lightextraction efficiency of the LED will be improved. Fourth, the carbonnanotube layer is a patterned structure and thickness and the size ofthe spaces are small, so when the carbon nanotube layer is used to growthe epitaxial layer, the epitaxial grains will have a smaller size, thedislocation will be reduced, and the quality of the semiconductor layerwill be improved.

Referring to FIG. 8, an LED 10 includes a first semiconductor layer 120,an active layer 130, a second semiconductor layer 140, a reflector 150,a first electrode 160, and a second electrode 170. The reflector 150,the first semiconductor layer 120, the active layer 130, the secondsemiconductor layer 140, and the second electrode 170 are stacked on asurface of the first electrode 160, in that order. The reflector 150 isin contact with the first electrode 160. A surface of the firstsemiconductor layer 120 defines a plurality of grooves 122 to form apatterned surface. The second electrode 170 is placed on the patternedsurface which is used as the light extraction surface. The width of thegrooves 122 ranges from about 50 nm to about 100 nm.

The second electrode 170 can be an N-type electrode or a P-typeelectrode. The type of the second electrode 170 is the same as that ofthe first semiconductor layer 120. The second electrode 170 can be asingle layer structure or a multi-layer structure. The material of thesecond electrode 170 can be selected from Ti, Ag, Al, Ni, Au, or anycombination. In one embodiment, the second electrode 170 is a two-layerstructure consisting of a Ti layer with a thickness of about 15 nm andan Au layer with a thickness of about 200 nm. The Au layer is attachedon the first semiconductor layer 120. The patterned surface of the firstsemiconductor layer 120 is partly covered by the second electrode 170.In one embodiment, the whole patterned surface of the firstsemiconductor layer 120 is covered by the second electrode 170, thus thecurrent diffusion speed will be improved and the heat produced in theLED will be reduced.

The light extraction surface of the LED 10 includes a plurality ofgrooves 122. As the photons reach the light extraction surface with alarge incident angle, the grooves 122 change the direction of motion ofthe photons, so that these photons can be extracted from the lightemitting surface. The light extraction efficiency of the LED 10 isimproved.

Referring to FIG. 9, a method for making an LED 20 includes thefollowing steps:

(S21) providing a substrate 100 having an epitaxial growth surface 101;

(S22) growing a buffer layer 1202 on the epitaxial growth surface 101;

(S23) placing a carbon nanotube layer 110 on the buffer layer 1202;

(S24) growing a first semiconductor layer 120, an active layer 130, anda second semiconductor layer 140 in that order on the buffer layer 1202and the carbon nanotube layer 110;

(S25) applying a reflector 150 and a first electrode 160 in that orderon a surface of the second semiconductor layer 140;

(S26) removing the substrate 100 and exposing the carbon nanotube layer110; and

(S27) applying a second electrode 170 on a surface of the carbonnanotube layer 110.

The method for making the LED 20 is similar to the method for making theLED 10, except that the buffer layer 1202 is grown on the substrate 100before the placing of the carbon nanotube layer 110. As the substrate100 is removed, the carbon nanotube layer 110 will be exposed.

In step (S22), the method of growing the buffer layer 1202 is similar tothe first semiconductor layer 110. The material of the buffer layer 1202is selected from Si, GaAs, GaN, GaSb, InN, InP, InAs, InSb, AlP, AlAs,AlSb, AlN, GaP, SiC, SiGe, GaMnAs, GaAlAs, GaInAs, GaAlN, GaInN, AlInN,GaAsP, InGaN, AlGaInN, AlGaInP, GaP:Zn, or GaP:N, according to the firstsemiconductor layer 110. In one embodiment, the buffer layer 1202 is alow-temperature GaN used to reduce the dislocation of the firstsemiconductor layer 120.

In one embodiment, the buffer layer 1202 is fabricated by the MOCVDmethod. The nitrogen source gas is high-purity NH₃, the carrier gas isH₂, and the Ga source gas is TEGa or TEGa. The growth of the bufferlayer 1202 includes the following steps:

(S221) placing the substrate 100 into a furnace and heating thesubstrate 100 to about 1100° C. to about 1200° C., introducing thecarrier gas, and baking the substrate 100 for about 200 seconds to about1000 seconds;

(S222) cooling down the temperature to a range from about 500° C. toabout 650° C. in the carrier gas atmosphere, and introducing the Gasource gas and the nitrogen source gas at the same time to growlow-temperature GaN layer.

In step (S23), the carbon nanotube layer 110 is placed on the bufferlayer 1202. The carbon nanotubes are in electrical contact with thebuffer layer 1202. When the carbon nanotube layer 110 is placed on thebuffer layer 1202, the plurality of carbon nanotubes are alignedparallel to the surface of the buffer layer 1202. The carbon nanotubelayer 110 includes a plurality of apertures 112, and the buffer layer1202 is exposed from the carbon nanotube layer 110 through the apertures112.

In step (S24), the Ga source gas is TMGa or TEGa, and the Si source gasis SiH₄. The method of growing the first semiconductor layer 120includes three stages. In the first stage, a plurality of epitaxialcrystal nuclei forms on the buffer layer 1202, and the epitaxial crystalnuclei grow a plurality of epitaxial crystal grains along a directionperpendicular to the buffer layer 1202. In the second stage, theplurality of epitaxial crystal grains grow into a continuous epitaxialfilm along the direction parallel to the surface of buffer layer 1202.In the third stage, the epitaxial film is made to grow continuouslyalong the direction perpendicular to the surface of the buffer layer1202 to form the first semiconductor layer 120.

In the second stage, during the growth process, the epitaxial crystalgrains will grow around the carbon nanotubes, and a plurality of grooves122 will be formed in the first semiconductor layer 110 where the carbonnanotubes exist. The carbon nanotubes are placed into the grooves 122and enclosed by the first semiconductor layer 120 and the buffer layer1202, thus the carbon nanotubes will be semi-enclosed by the firstsemiconductor layer 120. The surfaces of the carbon nanotubes will bepartly attached on the inner surface of the grooves 122. The pluralityof grooves 122 forms a patterned surface of the first semiconductorlayer 120. The patterned surface of the first semiconductor layer 120 issimilar to that of the carbon nanotube layer 110.

In step (S26), the substrate 100 can be removed by the method mentionedabove. However, because the buffer layer 1202 is sandwiched between thecarbon nanotube layer 110 and the substrate 100, the carbon nanotubescannot be directly attached on the surface of the substrate 100 andpeeled off together with the substrate 100. Furthermore, while thebuffer layer 1202 is being irradiated by the laser, the buffer layer1202 will be decomposed, and the buffer layer 1202 will be dissolved inthe solution, thus the carbon nanotube layer 110 can be detached fromthe buffer layer 1202. The carbon nanotubes will be preserved in thegrooves 122. Due to the buffer layer 1202, damage to the grooves 122will be reduced during the peeling process. The carbon nanotubes alsohave a diminished contacting surface between the buffer layer 1202 andthe first semiconductor layer 120, thus stress will be reduced.

In step (S27), the second electrode 170 is placed on the firstsemiconductor layer 120 via a process of physical vapor deposition. Thesecond electrode 170 is placed on the light extraction surface of theLED 20. The second electrode 170 covers a portion of the lightextraction surface. In one embodiment, the second electrode 170 coversthe entire light extraction surface, thus the current diffusion speedwill be improved and the heat produced in the LED will be reduced.

Furthermore, the second electrode 170 is in electrical contact with thecarbon nanotube layer 110. The carbon nanotube layer 110 includes acarbon nanotube film. The second electrode 170 is in electrical contactwith a portion of the carbon nanotube film. If the carbon nanotube layer110 includes a plurality of carbon nanotube wires parallel with eachother, the second electrode 170 electrically contacts each carbonnanotube wire. If the carbon nanotube layer 110 includes a plurality ofintersecting carbon nanotube wires, the second electrode 170electrically contacts at least one of the carbon nanotube wires.

Referring to FIG. 10, an LED 20 includes a carbon nanotube layer 110, afirst semiconductor layer 120, an active layer 130, a secondsemiconductor layer 140, a reflector 150, a first electrode 160, and asecond electrode 170. The reflector 150, the second semiconductor layer140, the active layer 130, the first semiconductor layer 120, the carbonnanotube layer 110, and the second electrode 170 are stacked on asurface of the first electrode 160 in that order. The reflector 150contacts the first electrode 160. A surface of the first semiconductorlayer 120 includes a plurality of grooves 122 to form a patternedsurface. The carbon nanotubes of the carbon nanotube layer 110 areembedded in the grooves 122. The second electrode 170 is placed on thepatterned surface used as the light extraction surface. The secondelectrode 170 electrically contacts the carbon nanotube layer 110 andthe first semiconductor layer 120.

Each groove 122 includes a carbon nanotube bundle consisting of at leastone carbon nanotube. The carbon nanotubes in the grooves are joined byvan der Waals force to form the carbon nanotube layer 110. The surfaceof the carbon nanotubes will be partly attached on the inner surface ofthe grooves 122. Because the carbon nanotubes have a specific surface,the carbon nanotubes will be fixed in the grooves 122.

In one embodiment, the carbon nanotube layer 110 is a carbon nanotubefilm. The carbon nanotube film includes a plurality of carbon nanotubesoriented along a preferred orientation. In the orientation, the carbonnanotubes are joined end to end. In the direction perpendicular to theorientation, a plurality of gaps or micro-holes exists between someadjacent carbon nanotubes. The gaps or micro-holes form the apertures112. The carbon nanotube layer 110 includes a plurality of apertures112. The first semiconductor layer 120 is partly infilled into theapertures 112.

Furthermore, the carbon nanotube layer 110 can also includes a pluralityof carbon nanotube wires parallel with each other. Each of the carbonnanotube wires is fixed into a groove 122. The distance between twoadjacent carbon nanotube wires ranges from about 0.1 μm to about 200 μm.In one embodiment, the distance ranges from about 10 μm to about 100 μm.The intervals between two adjacent carbon nanotube wires form theapertures 112 of the carbon nanotube layer 110. The smaller theapertures 112, the less dislocations will exist in the growth of thefirst semiconductor layer 120, and the quality of the semiconductorlayer 120 will be improved.

In one embodiment, the carbon nanotube layer 110 can also include aplurality of intersecting carbon nanotube wires. Some carbon nanotubewires are set along a first direction, and some carbon nanotube wiresare set along a second direction. The first direction intersects thesecond direction. In one embodiment, the first direction issubstantially perpendicular with the second direction. Thus the surfaceof the first semiconductor layer 120 includes a plurality of grooves 122which intersect.

In the LED 20, the carbon nanotube layer is a transparent andfree-standing structure and has a large contacting surface with theelectrode, thus the area of the second electrode can be reduced, thecurrent in the LED can be uniformly dispersed, and the second electrodearea can be reduced. The heat produced by the LED can be conducted outof the LED via the carbon nanotubes. Furthermore, the conduction currentin the LED can be uniformly dispersed, thereby improving the lightextraction efficiency.

Referring to FIG. 11, a method for making the LED 20 includes thefollowing steps:

(S31) providing a substrate 100 having an epitaxial growth surface 101;

(S32) growing a buffer layer 1202 and an intrinsic semiconductor layer1204 in that order on the epitaxial growth surface 101;

(S33) placing a carbon nanotube layer 110 on the intrinsic semiconductorlayer 1204;

(S34) growing a first semiconductor layer 120, an active layer 130, anda second semiconductor layer 140 in that order on the intrinsicsemiconductor layer 1204;

(S35) applying a reflector and a first electrode 160 on a surface of thesecond semiconductor layer 140;

(S36) removing the substrate 100 and the intrinsic semiconductor layer1204 to expose the carbon nanotube layer 110; and

(S37) applying a second electrode 170 on a surface of the carbonnanotube layer 110.

In step (S32), the method of growing the intrinsic semiconductor layer1204 on the buffer layer 1202 includes the following steps:

(S321) keeping the temperature of the furnace at a range from about1000° C. to about 1100° C. and the pressure in a range from about 100torr to about 300 torr; (S322) introducing the Ga source gas and growingthe intrinsic semiconductor layer 1204 on the buffer layer 1202.

In step (S322), the thickness of the intrinsic semiconductor layer 1204ranges from about 10 nm to about 1 μm.

In step (S34), the surface of the intrinsic semiconductor layer 1204 ispartly exposed through the apertures 112 of the carbon nanotube layer110, and the epitaxial grains grow on the surface and pass through theapertures 112 to form the first semiconductor layer 120. The activelayer 130 and the second semiconductor layer 140 are grown on thesurface of the intrinsic semiconductor layer 1204 in that order.

In step (S36), during the process of removing the substrate 100 withlaser, the buffer layer 1202 is decomposed and dissolved in the acidicsolution, thus the substrate 100 is peeled off. Furthermore, theintrinsic semiconductor layer 1204 can also be decomposed in the acidicsolution at the same time, thus the carbon nanotube layer 110 will beexposed. Furthermore, the intrinsic semiconductor layer 1204 can beremoved by ion etching or by wet etching.

In step (S37), the intrinsic semiconductor layer 1204 can be etched byplasma etching or by wet etching method. The intrinsic semiconductorlayer 1204 can be partly removed, and a portion of the carbon nanotubelayer 110 will be exposed. The intrinsic semiconductor layer 1204 canalso be completely removed, thus the whole carbon nanotube layer 110 isexposed. In one embodiment, the intrinsic semiconductor layer 1204 iscompletely removed via plasma etching method in an inductively coupledplasma system. The etching atmosphere is composed of chlorine andsilicon tetrachloride. The power of the inductively coupled plasmasystem is about 50 watts, the flow rate of the chlorine is about 26sccm, the flow rate of the silicon tetrachloride is about 4 sccm, andthe pressure of the atmosphere is about 2 Pascal.

Because the intrinsic semiconductor layer 1204 is grown on the bufferlayer 1202, the dislocations in the first semiconductor layer 120, theactive layer 130, and the second semiconductor layer 140 will bereduced, and the quality improved. Thereby, the light extractionefficiency of the LED 20 will be improved.

The method for making the LED has many advantages. First, the carbonnanotube layer is a continuous and free-standing structure, and can bedirectly placed on the substrate to grow the epitaxial layer. Theprocess is simple and a complex sputtering process is avoided. Second, aplurality of microstructures can be formed on the light extractionsurface of LED by using carbon nanotube layers as the mask layer,thereby avoiding a complex etching process and reducing the possibilityof damage to the lattice structure of the LED. Third, because the spacesin the carbon nanotube layer and the microstructures are small, thelight extraction efficiency will be improved.

Depending on the embodiment, certain of the steps of methods describedmay be removed, others may be added, and the sequence of steps may bealtered. It is also to be understood that the description and the claimsdrawn to a method may include some indication in reference to certainsteps. However, the indication used is only to be viewed foridentification purposes and not as a suggestion as to an order for thesteps.

It is to be understood that the above-described embodiments are intendedto illustrate rather than limit the disclosure. Variations may be madeto the embodiments without departing from the spirit of the disclosureas claimed. It is understood that any element of any one embodiment canbe incorporated in any other embodiment. The above-described embodimentsillustrate the scope of the disclosure but do not restrict the scope ofthe disclosure.

What is claimed is:
 1. A method of making a light emitting diode,comprising: providing a substrate having an epitaxial growth surface;growing a buffer layer on the epitaxial growth surface; growing anintrinsic semiconductor layer on the buffer layer; placing a carbonnanotube layer on the intrinsic semiconductor layer; growing a firstsemiconductor layer, an active layer, and a second semiconductor layerin that order on the intrinsic semiconductor layer, wherein the firstsemiconductor layer is covered on the carbon nanotube layer; applying afirst electrode on a surface of the second semiconductor layer; removingthe substrate, the buffer layer, and the intrinsic semiconductor layerto expose the carbon nanotube layer; and applying a second electrode toelectrically connect with the carbon nanotube layer.
 2. The method ofclaim 1, wherein the carbon nanotube layer is a continuous andfree-standing structure, and the carbon nanotube layer is directlyplaced on the intrinsic semiconductor layer.
 3. The method of claim 1,wherein the carbon nanotube layer comprises a carbon nanotube film, andthe carbon nanotube film comprises a plurality of carbon nanotubesoriented substantially along a same direction.
 4. The method of claim 3,wherein the carbon nanotubes are oriented substantially parallel to theintrinsic semiconductor layer.
 5. The method of claim 3, wherein aplurality of apertures is defined by the carbon nanotube layer and apart of the intrinsic semiconductor layer is exposed from the pluralityof apertures.
 6. The method of claim 5, wherein the first semiconductorlayer is grown from the exposed intrinsic semiconductor layer andthrough the plurality of apertures.
 7. The method of claim 1, wherein amaterial of the intrinsic semiconductor layer is Ga and grown via thefollowing steps: keeping a temperature of the furnace in a range fromabout 1000° C. to about 1100° C. and a pressure in a range from about100 torr to about 300 torr; and introducing a Ga source gas to grow theintrinsic semiconductor layer on the buffer layer.
 8. The method ofclaim 7, wherein a portion of the carbon nanotube layer is exposed bypartly removing the intrinsic semiconductor layer.
 9. The method ofclaim 7, wherein the intrinsic semiconductor layer is removed by an ionetching or a wet etching method.
 10. The method of claim 1, wherein theintrinsic semiconductor layer is removed via a plasma etching method inan inductive coupled plasma system in an etching atmosphere comprisingchlorine and silicon tetrachloride.
 11. The method of claim 1, wherein aplurality of grooves is formed on a surface of the first semiconductorlayer, and the plurality of carbon nanotubes are embedded in theplurality of grooves while growing the first semiconductor layer. 12.The method of claim 11, wherein the plurality of carbon nanotubes areenclosed by the first semiconductor layer and the intrinsicsemiconductor layer.
 13. The method of claim 11, wherein surfaces of thecarbon nanotubes is partly attached on an inner surface of the grooves.14. The method of claim 1, wherein the substrate is removed by laserirradiation, etching, or temperature expansion and contraction.
 15. Themethod of claim 14, wherein the buffer layer and the intrinsic layer isdecomposed while removing the substrate.
 16. The method of claim 1,wherein a thickness of the intrinsic layer ranges from about 10nanometers to about 1 micrometer.